Laboratory
| Future Research center On to the new Millennium KAGAWA FromKAGAWA | |
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Class1000 Clean room (Shared Facility)
UV lithography, Si deep etching, sputter, RIE, thermal oxidation |
| Building for Integrated Research, Kagawa University | |
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Class10000 Clean room (Shared Facility) EB lithography, maskless UV lithography, ion implantation, wafer bonding, ion-beam sputter, thermal deposition |
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Measurement Room (Shared Facility)
FE-SEM, 3D profiler, ellipsometer, stylus profiler… |
| Faculty of Engineering Building No 1 and 6, Kagawa University | |
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Office/Optics Lab (rm.1208) Laser manipulation, 3D printing… |
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Bio Lab (rm.6803) Cell culture, biosample preparation, optical microscopy, biosensing… |
Biological Experiment
Bio Measurement
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Inverted fluorescence microscope x 5
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Uplight fluorescence microscope
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Deltavision microscope
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EM-CCD camera
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sCMOS camera
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Time-lapse observation system
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Piezo-driven x-y-z stage
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CO2 chamber for microscope x 2
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SPECTRA X light engine
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Dual-beam optical tweezers system
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Cell-handling system
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Oscilloscope x 2
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Function synthesizer x 2
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Bipolar amplifier x 2
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SPR sensing system x 2
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Cyclic voltammetry system x 2
- qPCR system
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Freeze-drying system for electron microscope
- Spectrometer
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Gel documentation system
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Auto cell counter
- Miniature microscope for time-lapse cell imaging
- Cell analyzer
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Bio Experiment
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Laminar flow cabinet x 2
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Centrifuge x 2
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Milli-Q system
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Autoclave
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Deep freezer & biocane
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CO2 incubator x 2
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Syringe pump x 6
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Microfluidics pump x 3
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UV ozone cleaner
- Ultrasonic disperser
- Ultrasonic cleaner
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Micro/Nano Fabrication and Measurement
Fabrication
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EB writer
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Maskless lithography system
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Spin coater
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Mask aligner
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Thermal evaporation system
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Dual-beam ion sputtering system
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RF magnetron sputtering system
- Plasma cleaner
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Reactive ion etching system
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ICP-RIE system
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Ion implantation system
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Thermal oxidation system
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Wafer dicing system
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Wafer bonding system
- 3D printer
- PDMS micromolding system
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Measurement
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Measuring microscope
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Stylus profiler
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Non-contact profilometer
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Ellipsometer
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FE-SEM+EDS
- 3D laser scanning confocal microscope
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PC-based platform for measurement and automation systems x 2
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COMSOL workstation
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