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====== Lab ====== ** Future Research center On to the new Millennium KAGAWA [[http://www.kagawa-isf.jp/from/|FromKAGAWA]]**\\ __Class1000 Clean room__\\ {{:cleanroom_from.jpg|class 1000 clean room}}\\ UV lithography, Si deep etching, sputter, RIE, thermal oxidation\\ \\ **Building for Integrated Research, Kagawa University **\\ __Class10000 Clean room__\\ {{:cleanroom_6f.jpg|class 10000 clean room}}\\ EB lithography, maskless UV lithography, ion implantation, wafer bonding, ion-beam sputter, thermal deposition\\ \\ __Measurement Room__\\ {{:bunsekiroom.jpg|measurement room}}\\ SEM, 3D profiler, ellipsometer, stylus profiler...\\ \\ **Faculty of Engineering Building No 1, Kagawa University **\\ __Bio Lab (rm.1208)__\\ {{:1208.jpg?nolink&250|rm.1208}}\\ Cell culture, Biosample preparation, Microscopy, Biosensing...\\ ======Biological Experiment====== **Bio Measurement**\\ * Inverted fluorescence microscope x 3 * Uplight fluorescence microscope * Deconvolution microscope * EM-CCD camera * sCMOS camera * Time-lapse observation system * Piezo-driven x-y-z stage * CO2 chamber for microscope x 2 * SPECTRA X light engine * Dual-beam optical tweezers system * Cell-handling system * Osciloscope x 2 * Function synthesizer x 2 * Bipolar amplifier x 2 * SPR sensing system x 2 * Cyclic voltametry system * Freeze-drying system for electron microscope * PC-based platform for measurement and automation systems x 2 * COMSOL workstation * 3D printer * … \\ **Bio Experiment**\\ * Laminar flow cabinet * Centrifuge * Milli-Q system * Autocalve * Deep freezer & biocane * CO2 incubator x 2 * Spectrometer * Syringe pump x 2 * Microfluidics pump x 3 * Gel documentation system * Auto cell counter * UV ozone cleaner * … ======Micro/Nano Fabrication and Measurement====== **Fabrication**\\ * EB writer * Maskless lithography system * Spin coater * Mask aligner * Thermal evaporation system * Dual-beam ion sputtering system * RF magnetron sputtering system * Parylene coater * Reactive ion etching system * ICP-RIE system * Ion implantation system * Thermal oxidation system * Wafer dicing system * Wafer bonding system * … \\ **Measurement**\\ * AFM * Measuring microscope * Zeta-potential and particle-size analyzer * Stylus profiler * Non-contact profilometer * Ellipsometer * SEM+EDS * … \\ ----

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